Feem ntau siv semiconductor siab sensor siv N-hom silicon wafer ua substrate.Ua ntej, cov silicon wafer yog ua rau hauv ib qho kev nyuab siab-kev coj tus kheej nrog ib qho geometry.Ntawm qhov kev ntxhov siab-kev coj tus kheej ntawm silicon wafer, plaub P-hom diffusion resistors yog ua raws cov lus qhia sib txawv, thiab tom qab ntawd plaub-arm Wheatstone choj yog tsim nrog plaub tus resistors.Nyob rau hauv qhov kev txiav txim ntawm sab nraud quab yuam, cov kev hloov ntawm qhov tseem ceeb kuj ua rau hluav taws xob teeb liab.Tus choj wheatstone no nrog cov nyhuv siab yog lub plawv ntawm lub siab sensor, uas feem ntau hu ua piezoresistive choj (raws li qhia hauv daim duab 1).Cov yam ntxwv ntawm tus choj piezoresistive yog raws li hauv qab no: ① qhov tseem ceeb ntawm kev tiv thaiv ntawm plaub caj npab ntawm tus choj yog sib npaug (tag nrho r0);② Cov nyhuv piezoresistive ntawm caj npab nyob ib sab ntawm tus choj yog sib npaug ntawm tus nqi thiab rov qab rau hauv kos npe;③ Qhov ntsuas kub tsis kam coefficient ntawm plaub caj npab ntawm tus choj yog tib yam, thiab lawv ib txwm nyob ntawm qhov kub thiab txias.Hauv daim duab.1, R0 yog tus nqi tiv thaiv tsis muaj kev ntxhov siab ntawm chav tsev kub;RT yog qhov kev hloov pauv los ntawm qhov kub coefficient ntawm qhov tsis kam (α) thaum qhov kub hloov pauv;Υ Rδ yog qhov kev hloov ntawm kev tawm tsam los ntawm strain (ε);Cov zis hluav taws xob ntawm tus choj yog u = I0 Δ Rδ = I0RGδ (tus choj tam sim no tsis tu ncua).

Qhov twg I0 yog qhov tam sim no qhov tam sim no thiab e yog qhov hluav taws xob qhov hluav taws xob tas li.Cov zis hluav taws xob ntawm tus choj piezoresistive yog ncaj qha proportional rau lub hom (ε) thiab tsis muaj dab tsi cuam tshuam nrog RT tshwm sim los ntawm qhov kub thiab txias coefficient ntawm kev ua haujlwm, uas zoo heev txo qhov kub thiab txias ntawm lub sensor.Feem ntau siv semiconductor siab sensor yog lub sensor rau kev kuaj xyuas cov kua dej.Nws cov qauv tseem ceeb yog cov tshuaj ntsiav ua los ntawm monocrystalline silicon (raws li qhia hauv daim duab 2).Lub diaphragm yog ua rau hauv lub khob, thiab hauv qab ntawm lub khob yog qhov uas dais lub zog sab nraud, thiab lub siab choj yog ua rau hauv qab ntawm lub khob.Lub nplhaib pedestal yog ua los ntawm tib silicon ib qho khoom siv lead ua, thiab tom qab ntawd lub diaphragm yog sib koom ua ke rau lub pedestal.Hom kev ntsuas siab no muaj qhov zoo ntawm qhov kev xav tau siab, ntim me me thiab ruaj khov, thiab tau siv dav hauv aviation, chaw navigation, automation instruments thiab cov cuab yeej kho mob.