Haum rau Hitachi KM11 roj siab sensor EX200-2-3-5

Plaub lub siab thev naus laus zis ntawm lub siab sensor

1. Capacitive

capacitive siab sensors feem ntau yog nyiam los ntawm ntau tus OEM kev thov. Kev txheeb xyuas qhov kev hloov pauv ntawm ob qhov chaw ua rau cov sensors paub qhov tsis tshua muaj siab thiab lub tshuab nqus tsev. Nyob rau hauv peb cov kev teeb tsa lub teeb pom kev zoo, lub vaj tsev compact muaj ob qhov sib ze, sib luag thiab cov hluav taws xob sib cais ntawm cov hlau, ib qho ntawm qhov tseem ceeb yog lub diaphragm uas tuaj yeem khoov me ntsis hauv siab. Cov chaw ruaj khov no (lossis cov phaj) tau teeb tsa kom qhov khoov ntawm lub rooj sib txoos hloov qhov sib txawv ntawm lawv (ua tau tsim ib lub capacitor sib txawv). Qhov kev hloov pauv tau raug kuaj pom los ntawm kev sib piv cov kab hluav taws xob sib piv nrog (lossis ASIC), uas ua kom nrov thiab tso tawm cov teeb liab sib npaug siab.

2.CVD hom

chemical vapor deposition (lossis "CVD") kev tsim cov txheej txheem sib cog lus polysilicon txheej rau stainless hlau diaphragm ntawm qib molecular, yog li tsim sensor nrog kev ua haujlwm ntev ntev. Feem ntau batch processing semiconductor manufacturing method yog siv los tsim polysilicon strain gauge txuas hniav nrog kev ua tau zoo heev ntawm tus nqi tsim nyog. CVD qauv muaj tus nqi zoo heev thiab yog qhov nrov tshaj plaws sensor hauv OEM daim ntawv thov.

3. Sputtering zaj duab xis hom

Sputtering zaj duab xis deposition (los yog "zaj duab xis") tuaj yeem tsim lub sensor nrog qhov siab tshaj plaws ua ke linearity, hysteresis thiab repeatability. Qhov tseeb tuaj yeem siab li 0.08% ntawm tag nrho cov nplai, thaum lub sij hawm ntev drift tsawg li 0.06% ntawm tag nrho cov nplai txhua xyoo. Kev ua tau zoo tshaj plaws ntawm cov cuab yeej tseem ceeb-peb sputtered nyias zaj duab xis sensor yog cov khoom muaj nqis hauv kev lag luam siab.

4.MMS hom

Cov sensors no siv micro-machined silicon (MMS) diaphragm los xyuas cov kev hloov siab. Lub silicon diaphragm yog cais tawm los ntawm qhov nruab nrab los ntawm cov roj puv 316SS, thiab lawv hnov ​​​​mob hauv cov txheej txheem nrog cov txheej txheem kua dej. MMS sensor txais kev siv tshuab semiconductor ntau lawm, uas tuaj yeem ua tiav qhov hluav taws xob tsis zoo, zoo linearity, zoo heev thermal shock kev ua tau zoo thiab ruaj khov nyob rau hauv ib qho compact sensor pob.