Excavator siab sensor yog qhov siv dav tshaj plaws sensor, nws yog lub ntsiab lus dav dav rau kev kuaj xyuas roj, kua, khoom thiab lwm yam khoom nruab nrab ntawm lub zog inductive, kuj suav nrog
Manometers uas ntsuas huab cua siab saum toj no thiab lub tshuab nqus tsev ntsuas qhov ntsuas cua siab hauv qab no. Muaj ntau ntau hom kev quab yuam sensor, txoj kev ntsuas ib txwm siv yog siv lub deformation thiab txav ntawm elastic ntsiab lus los qhia txog kev saib xyuas ntawm lub tshuab hluav taws xob txhaj tshuaj, tab sis nws cov ntim loj, clumsy, thiab cov zis tsis yog linear. Nrog kev loj hlob ntawm microelectronics kev txawj ntse, kev siv cov khoom siv semiconductor piezoresistive effect thiab superior elasticity, kev txhim kho ntawm semiconductor quab yuam sensors, tseem ceeb silicon piezoresistive thiab capacitive ob, lawv muaj me me, lub teeb yuag, siab rhiab heev zoo, yog dav siv nyob rau hauv semiconductor quab yuam. sensors. Thaum ib tug semiconductor yog stressed upward rau ib tug siv lead ua, nws resistivity yuav hloov. Kev sib raug zoo ntawm tus neeg xyuas pib hloov pauv thiab kev ntxhov siab yog hu ua semiconductor piezoresistive effect, thiab cov neeg kho tshuab kom muaj nuj nqis sensor ua los ntawm cov nyhuv no yog hu ua piezoresistive force sensor, uas muaj ob hom, ib qho yog lub sensor ua los ntawm semiconductor strain gauge pasted rau ntawm lub piezoresistive force sensor. elastic element, uas yog hu ua pasted piezoresistive sensor. Lwm qhov yog diffusion tsis kam ua los ntawm kev sib xyaw ua ke ntawm cov cuab yeej siv hluav taws xob ntawm cov khoom siv hluav taws xob hauv cov khoom siv semiconductor, kom cov ntsuas ntsuas thiab cov silicon substrate tsim tib lub sensor, hu ua diffusion piezoresistive sensor. Nws muaj cov yam ntxwv ntawm kev ua haujlwm siab, siab precision, me me, lub teeb yuag, kev ua haujlwm siab, cov qauv yooj yim, txhim khu kev qha ua haujlwm thiab lub neej ntev.