Cov qauv ntawm Piezoresistive Sensor

Nyob rau hauv no sensor, lub resistor sawb yog kev koom ua ke nyob rau hauv lub monocrystalline silicon diaphragm los ntawm kev koom ua ke ua ib tug silicon piezoresistive nti, thiab lub periphery ntawm no nti yog fixedly ntim rau hauv lub plhaub, thiab cov electrode leads yog coj tawm. Piezoresistive siab sensor, tseem hu ua solid-state siab sensor, yog txawv los ntawm cov nplaum strain gauge, uas yuav tsum tau hnov ​​lub sab nraud quab yuam indirectly los ntawm elastic rhiab ntsiab, tab sis ncaj qha hnov ​​lub siab ntsuas los ntawm silicon diaphragm.

Ib sab ntawm silicon diaphragm yog lub siab-siab kab noj hniav sib txuas lus nrog lub ntsuas siab, thiab lwm sab yog lub siab-siab kab noj hniav sib txuas lus nrog cov cua. Feem ntau, cov silicon diaphragm yog tsim los ua ib lub voj voog nrog lub voj voog ruaj khov, thiab qhov sib piv ntawm txoj kab uas hla mus rau thickness yog li 20 ~ 60. Plaub P impurity resistance strips yog diffused hauv zos ntawm lub voj voog silicon diaphragm thiab txuas mus rau hauv ib tug tag nrho tus choj, ob qho tib si. yog nyob rau hauv lub compressive kev nyuaj siab cheeb tsam thiab lwm yam ob yog nyob rau hauv lub tensile kev nyuaj siab cheeb tsam, uas yog symmetrical nrog rau qhov chaw ntawm lub diaphragm.

Tsis tas li ntawd, tseem muaj square silicon diaphragm thiab silicon kem sensor. Lub silicon cylindrical sensor kuj tseem ua los ntawm cov strips resistive los ntawm diffusion nyob rau hauv ib qho kev taw qhia ntawm ib lub dav hlau siv lead ua ntawm silicon cylinder, thiab ob lub tensile stress resistive strips thiab ob compressive stress resistive strips tsim ib tug choj tag.

Piezoresistive sensor yog ib qho cuab yeej ua los ntawm diffusion tsis kam ntawm substrate ntawm cov khoom siv semiconductor raws li cov nyhuv piezoresistive ntawm cov khoom siv semiconductor. Nws cov substrate tuaj yeem siv ncaj qha los ntawm kev ntsuas ntsuas, thiab qhov kev tawm tsam tsis sib haum yog txuas nrog hauv cov substrate hauv daim ntawv ntawm tus choj.

Thaum lub substrate deformed los ntawm sab nraud quab yuam, qhov kev tiv thaiv qhov tseem ceeb yuav hloov thiab tus choj yuav tsim cov khoom tsis sib xws. Cov substrates (los yog diaphragms) siv los ua piezoresistive sensors feem ntau yog silicon wafers thiab germanium wafers. Silicon piezoresistive sensors ua los ntawm silicon wafers raws li cov ntaub ntawv rhiab heev tau nyiam ntau thiab ntau cov xim, tshwj xeeb tshaj yog cov khoom-state piezoresistive sensors rau ntsuas siab thiab ceev yog qhov siv dav tshaj plaws.